Hanwha Momentum

Business Areas

Hanwha Momentum is engaged in secondary battery, display,
clean logistics, factory automation, and new and renewable energy
industries based on thermal and automation technologies.

Clean Logistics

Display/semiconductor clean logistics equipment is a clean, automated facility specialized in clean manufacturing processes.
We provide a total solution optimized to meet customer needs, including logistics consulting, design, installation, and after-sales service.

Clean Stocker (Glass Cassette)

It is a display clean automation equipment that store/preserve/transport Glass Cassette and can be implemented according to customer requirements.

Spec

Environment Cleanness : Class10~Class1000
Pay Load : Max. 1,000kg
Velocity : Max. 3.5m/sec
Velocity : 1.5m/sec
Acc/Dec : 0.75m/sec²
Fork Loading Time : within 11
Vibration : RMS 0.3 G or less

BRC (OCS : Overhead Conveyor System)

It is a display clean automation equipment that transport Glass Cassette between logistics equipment and can be implemented according to customer requirements.

Spec

Environment Cleanness : Class10~Class1000
Pay Load : Max. 1,000kg
Velocity : Max. 2m/sec
Vibration : RMS 0.8 G or less

Clean Lifter

It is a display clean automation equipment that transport Glass Cassette between floors and can be implemented according to customer requirements.

Spec

Environment Cleanness : Class10~Class1000
Pay Load : Max. 1,000kg
Velocity : Max. 2.5m/sec
Height : Max. 90m

OHT

This semiconductor clean automation equipment transfers wafer FOUP, FOSB, POD, and glass FOUP between logistics equipment and process equipment and can be implemented according to customer specifications.

Spec

Environment Cleanness : Class10~Class1000
Pay Load : Max. 70kg
Velocity : Max. 3.5m/sec
Acc/Dec : 1.5m/sec²
Vibration : RMS 0.8 G or less

Clean Stocker (Wafer FOUP & FOSB & POD)

This auto storage system is for the clean logistics system for semiconductors, which stores and sorts the wafer FOUP, FOSB, POD, and cassette. It can be implemented in various types of forms such as a chamber type, rack type and others that suit the required specifications of different semiconductor processes.

Spec

Environment Cleanness : Class1 ~ Class1000
Velocity : 1.5m/sec
Acc/Dec : 2.5m/sec²
Vibration : Not greater than RMS 0.5 G
Purge : PN2 purge at all times
Environment Control : Humidity, Temperature, Pressure, oxygen concentration

Tower Lifter

Being the clean logistics system for semiconductors, it is an auto lift & storage system that transfers the wafer FOUP&FOSB to each floor.

Spec

Lifting Stroke : Max 60m
Lift Velocity : 360m/min
Fork Loading Time : Within 3sec
Acc/Dec : 2m/sec²
Vibration : Not greater than RMS 0.8G

OHT

Spec

Environment Cleanness : Class10~Class1000
Pay Load : 10~70kg
Velocity : Max. 3.5m/sec
Acc/Dec : 1.5m/sec²
Vibration: RMS 0.8 G or less

EFEM

This semiconductor clean logistics equipment transfers semiconductor wafers from FOUP & FOSB to process equipment and can be implemented according to customer specifications.

Spec

Environment Cleanness : Class10~Class1000
Velocity : 0.7m/sec
Rotate : 240°/sec

Cleaner

This equipment removes impurities on the substrate during the display/semiconductor manufacturing process and can be implemented according to customer specifications.

Features

Oxide Blocking
Cleaning Uniformity
Temperature Control
Minimal Use of Utilities
Safety

Developer

This equipment develops PR exposed in the display/semiconductor manufacturing process and can be implemented according to customer specifications.

Features

Develop Fume Blocking
Develop Uniformity
Temperature Control
Minimal Use of Utilities
Safety

Stripper

manufacturing process and can be implemented according to customer specifications.

Features

Strip Fume Blocking
Strip & Remove Uniformity
Temperature Control
Minimal Use of Utilities
Safety